Access content directly
Documentation
EN
French (FR)
English (EN)
Sign in
Collection
PLASMA_ETCHING
Search
Loading...
Advanced Search
Information de documents
Titles
Titles
Subtitle
Work title
hal_serie_t
Default search field (multi-criteria) + PDF full text
Abstract
Full text of PDF document
Keywords
Document type
Document subtype
All document identifiers
HAL submission identifier
Language of document (text)
Country (Text)
City
hal_inPress_bool
Add
Author
Author (multi-criteria)
Author (multi-criteria)
Author: Full name
Author: Last name
Author: First name
Author: middle name
Author: funding institution
Author: IdHal (string)
Author: function
Author: personID (integer)
Author: funding institution identifier
Author: Structure identifier
Thesis director
Publisher
Scientific editor
Series editor
Add
Structure
Structure (multi-criteria)
Structure (multi-criteria)
Structure: Acronym
Structure: Name
Structure: Code
Structure: Country
Structure: Type
Structure: Referential status
Structure: Internal structure identifier
Structure/research team: Country
Structure/department: Country
Structure/laboratory: Country
Structure/group of departments: State
Structure/institution: Country
Structure/group of institutions: Country
Add
Autres
Default search field (multi-criteria)
Default search field (multi-criteria)
Journals (multi-criteria)
Journal: Publisher
Journal: Abbreviated title
Journal: Title
Journal: Internal identifier
Journal: beginning publication date
Journal: online ISSN
Journal: ISSN
Journal: Publisher
Journal: SHERPA/RoMEO color
Journal: referential status
Conference (multi-criteria)
Conference: Title
Conference: Organiser
Conference: beginning date (Year)
Conference: end date (Year)
Invited communication (yes/no)
ANR project (multi-criteria)
ANR project: Acronym
hal_anrProjectAcronymProgram_t
ANR project: Code decision (reference)
ANR project: Name
ANR project: Internal identifier
ANR project: Referential Status
European project (multi-criteria)
European project: Acronym
European project: Call identifier
European project: Reference
European project: Name
European project: end date
European project: Funding
European project: beginning date
European project: Referential status
European project: Internal identifier
Publication date: year
Release date: year
hal_publicationDateY_i
Writing date: year
Date modified: year
Submission Date: year
Online Publication date: year
HAL Collection (multi-criteria)
HAL Collection: category
HAL Collection: Code
HAL Collection: Name
HAL Collection: Internal identifier
Contributor/author Internal identifier
Contributor/author Full name
Domains
Primary domain
Root domain
Sub-domain level 1
Sub-domain level 2
Sub-domain level 3
Status of document
Document version
Submission type
Document type
ISBN
Number - reference
Identifier: DOI
Classification
Audience
Vulgarization
Peer reviewing - text (yes or no)
Conference proceedings
Internal reference
Funding
Collaborations
Add
Lancer la recherche
Search using SolR syntax
Search using SolR syntax
Run the search
Vers la recherche avancée
Upload
Plasma etching
Home
Browse
Document list
By authors in a lab
List by authors
By document type
By year
×
×
×
Loading...
×
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
other
all
Fulltext
Notice
Annex
Yoon J.
Younesy Salma
Youssef Laurène
Youssef Laurène
